ACTIVATED REACTIVE EVAPORATION

被引：0

|

作者：

EBERT, J

机构：

来源：

PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1982年 / 325卷

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：29 / 38

页数：10

相关论文

共 50 条

[31] SYNTHESIS OF TIC-NI CERMETS BY ACTIVATED REACTIVE EVAPORATION PROCESS
NIMMAGADDA, R
BUNSHAH, RF
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 532 - 535
[32] Characterization of indium nitride films deposited by activated reactive evaporation process
Patil, SJ
Bodas, DS
Mandale, AB
Gangal, SA
THIN SOLID FILMS, 2003, 444 (1-2) : 52 - 57
[33] DEPOSITION AND PROPERTIES OF CADMIUM-OXIDE FILMS BY ACTIVATED REACTIVE EVAPORATION
PHATAK, G
LAL, R
THIN SOLID FILMS, 1994, 245 (1-2) : 17 - 26
[34] ACTIVATED REACTIVE EVAPORATION OF TIO2 LAYERS AND THEIR ABSORPTION INDEXES
KUSTER, H
EBERT, J
THIN SOLID FILMS, 1980, 70 (01) : 43 - 47
[35] COMPOSITION, STRUCTURE AND HARDNESS OF ZRCX FILMS FORMED BY ACTIVATED REACTIVE EVAPORATION
ARAI, T
KOBAYASHI, T
ITAGAKI, T
TAKEI, A
ISHIDA, A
DOI, H
JOURNAL OF THE JAPAN INSTITUTE OF METALS, 1990, 54 (11) : 1250 - 1255
[36] HIGH-RATE DEPOSITION OF HAFNIUM NITRIDE BY ACTIVATED REACTIVE EVAPORATION (ARE)
NIMMAGADDA, R
BUNSHAH, RF
THIN SOLID FILMS, 1979, 63 (02) : 327 - 331
[37] Evaluation of transparent barrier alumina coating deposited by activated reactive evaporation
Inagawa, Konosuke, 2000, Nihon Shinku Kyokai, Tokyo, Japan (43):
[38] Activated reactive evaporation deposited silicon nitride as a masking material for MEMS fabrication
Patil, SJ
Gangal, SA
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (10) : 1956 - 1962
[39] Formation of Ti-Al-N films by an activated reactive evaporation (ARE) method
Ide, Yukio
Inada, Kazunori
Nakamura, Takashi
Maeda, Masafumi
Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals, 1998, 62 (01): : 98 - 105
[40] Deposition of indium nitride films by activated reactive evaporation process - a feasibility study
Patil, SJ
Bodas, DS
Mandale, AB
Gangal, SA
APPLIED SURFACE SCIENCE, 2005, 245 (1-4) : 73 - 78

← 1 2 3 4 5 →