INFLUENCE OF P AND AS IMPLANTATION OF THE FORMATION OF MOSI2

被引：12
|
作者：
VANOMMEN, AH
WOLTERS, RAM
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 11期
关键词：
D O I：
10.1063/1.335583
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：4043 / 4048
页数：6
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