PROPERTIES OF ALUMINUM NITRIDE FILMS BY AN ION-BEAM AND VAPOR-DEPOSITION METHOD

被引：37
|
作者：
OGATA, K
ANDOH, Y
KAMIJO, E
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(89)90766-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：178 / 181
页数：4
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