SINGLE WAFER HIGH-RATE RIE EMPLOYING MAGNETRON DISCHARGE

被引：0
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作者：
SCHULTHEIS, S
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来源：
SOLID STATE TECHNOLOGY | 1985年 / 28卷 / 04期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：233 / 236
页数：4
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