SINGLE WAFER HIGH-RATE RIE EMPLOYING MAGNETRON DISCHARGE

被引：0

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作者：

SCHULTHEIS, S

机构：

来源：

SOLID STATE TECHNOLOGY | 1985年 / 28卷 / 04期

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中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：233 / 236

页数：4

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