SUPPLEMENTAL MULTILEVEL INTERCONNECTS BY LASER DIRECT WRITING - APPLICATION TO GAAS DIGITAL INTEGRATED-CIRCUITS

被引：33

|

作者：

BLACK, JG

DORAN, SP

ROTHSCHILD, M

EHRLICH, DJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 15期

关键词：

D O I：

10.1063/1.97993

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1016 / 1018

页数：3

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