SUPPLEMENTAL MULTILEVEL INTERCONNECTS BY LASER DIRECT WRITING - APPLICATION TO GAAS DIGITAL INTEGRATED-CIRCUITS

被引：33
|
作者：
BLACK, JG
DORAN, SP
ROTHSCHILD, M
EHRLICH, DJ
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 15期
关键词：
D O I：
10.1063/1.97993
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1016 / 1018
页数：3
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