APPLICATION OF ALUMINUM-OXIDE TO INTEGRATED-CIRCUITS FABRICATION

被引：3

作者：

HARADA, H ^{[1
]}

SATOH, S ^{[1
]}

YOSHIDA, M ^{[1
]}

机构：

[1] MITSUBISHI ELECT CORP,ITAMI CITY,HYOGO 664,JAPAN

来源：

关键词：

D O I：

10.1109/TR.1976.5220012

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

页码：290 / 295

页数：6

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