APPLICATION OF ALUMINUM-OXIDE TO INTEGRATED-CIRCUITS FABRICATION

被引：3
|
作者：
HARADA, H [1 ]
SATOH, S [1 ]
YOSHIDA, M [1 ]
机构：
[1] MITSUBISHI ELECT CORP,ITAMI CITY,HYOGO 664,JAPAN
来源：
IEEE TRANSACTIONS ON RELIABILITY | 1976年 / 25卷 / 05期
关键词：
D O I：
10.1109/TR.1976.5220012
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：290 / 295
页数：6
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