共 50 条
- [43] DESIGN CONSIDERATIONS FOR SILICON CIRCULAR DIAPHRAGM PRESSURE SENSORS JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (07): : 1049 - 1052
- [44] Porous silicon/polysilicon for improved sensitivity pressure sensors PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 6, NO 7, 2009, 6 (07): : 1759 - 1762
- [45] CHARACTERIZATION OF SILICON CARBIDE PRESSURE SENSORS AT 800 °C 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 2080 - 2083
- [47] Dynamic calibration of low range silicon pressure sensors IMTC/2001: PROCEEDINGS OF THE 18TH IEEE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE, VOLS 1-3: REDISCOVERING MEASUREMENT IN THE AGE OF INFORMATICS, 2001, : 493 - 496
- [50] Integrated Optical Pressure Sensors in Silicon-on-Insulator IEEE PHOTONICS JOURNAL, 2012, 4 (02): : 443 - 450