SILICON SENSORS LEAD PRESSURE TRANSMITTER TECHNOLOGY

被引:0
|
作者
BUCHY, F
机构
关键词
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:37 / 39
页数:3
相关论文
共 50 条
  • [41] POLYCRYSTALLINE SILICON MICROMACHINING - A NEW TECHNOLOGY FOR INTEGRATED SENSORS
    HOWE, RT
    ANNALS OF BIOMEDICAL ENGINEERING, 1986, 14 (02) : 187 - 197
  • [42] SILICON-ON-INSULATOR (SOI) STRUCTURES FOR PRESSURE SENSORS
    GIVARGIZOV, EI
    LIMANOV, AB
    PRJAKHIN, GD
    VAGANOV, VI
    SENSORS AND ACTUATORS A-PHYSICAL, 1991, 28 (03) : 215 - 222
  • [43] DESIGN CONSIDERATIONS FOR SILICON CIRCULAR DIAPHRAGM PRESSURE SENSORS
    YASUKAWA, A
    SHIMADA, S
    MATSUOKA, Y
    KANDA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (07): : 1049 - 1052
  • [44] Porous silicon/polysilicon for improved sensitivity pressure sensors
    Sujatha, L.
    Bhattacharya, Enakshi
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 6, NO 7, 2009, 6 (07): : 1759 - 1762
  • [45] CHARACTERIZATION OF SILICON CARBIDE PRESSURE SENSORS AT 800 °C
    Okojie, Robert S.
    Lukco, Dorothy
    Chang, Carl W.
    Savrun, Ender
    2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 2080 - 2083
  • [46] Vacuum-sealed silicon micromachined pressure sensors
    Tohoku Univ, Sendai, Japan
    Proc IEEE, 8 (1627-1639):
  • [47] Dynamic calibration of low range silicon pressure sensors
    Zakrzewski, J
    Wróbel, K
    IMTC/2001: PROCEEDINGS OF THE 18TH IEEE INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE, VOLS 1-3: REDISCOVERING MEASUREMENT IN THE AGE OF INFORMATICS, 2001, : 493 - 496
  • [48] Vacuum-sealed silicon micromachined pressure sensors
    Esashi, M
    Sugiyama, S
    Ikeda, K
    Wang, YL
    Miyashita, H
    PROCEEDINGS OF THE IEEE, 1998, 86 (08) : 1627 - 1639
  • [49] TEMPERATURE CHARACTERISTICS OF MICROCRYSTALLINE AND POLYCRYSTALLINE SILICON PRESSURE SENSORS
    GUO, SW
    TAN, SS
    WANG, WY
    SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) : 133 - 136
  • [50] Integrated Optical Pressure Sensors in Silicon-on-Insulator
    Hallynck, E.
    Bienstman, P.
    IEEE PHOTONICS JOURNAL, 2012, 4 (02): : 443 - 450