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- [31] SILICON CARBIDE PRESSURE SENSORS FOR HARSH ENVIRONMENTS 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, : 2154 - 2157
- [32] Sensitivity and stress in pressure sensors with composite silicon/macroporous silicon membranes PROCEEDINGS OF THE 2007 INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES: IWPSD-2007, 2007, : 737 - 740
- [34] Product Development and Technology Migration of Pressure Sensors 2017 2ND IEEE INTERNATIONAL CONFERENCE ON RECENT TRENDS IN ELECTRONICS, INFORMATION & COMMUNICATION TECHNOLOGY (RTEICT), 2017, : 1919 - 1922
- [36] Capacitive Pressure Sensors Realized With LTCC Technology 2008 31ST INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY: RELIABILITY AND LIFE-TIME PREDICTION, 2008, : 269 - +
- [37] Integrating Diamond Sensors in Silicon Technology Integrated Circuits STRUCTURAL HEALTH MONITORING 2011: CONDITION-BASED MAINTENANCE AND INTELLIGENT STRUCTURES, VOL 2, 2013, : 1543 - 1549
- [38] Silicon micromachined sensors and actuators in bonded wafer technology PHYSICS OF SEMICONDUCTOR DEVICES, VOLS 1 AND 2, 1998, 3316 : 463 - 470
- [40] TURBULENCE MEASUREMENTS USING SENSORS BASED ON SILICON TECHNOLOGY ICIASF 89 RECORD: INTERNATIONAL CONGRESS ON INSTRUMENTATION IN AEROSPACE SIMULATION FACILITIES, 1989, : 95 - 103