TEMPERATURE DISTRIBUTION ON THIN-FILM METALLIZATIONS

被引：15
|
作者：
CHAUG, YS
HUANG, HL
机构：
[1] TATUNG INST TECHNOL,TAIPEI,TAIWAN
[2] NATL TAIWAN UNIV,DEPT PHYS,TAIPEI,TAIWAN
来源：
JOURNAL OF APPLIED PHYSICS | 1976年 / 47卷 / 05期
关键词：
D O I：
10.1063/1.322890
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1775 / 1779
页数：5
相关论文
共 50 条
  • [21] A GALVANIC SERIES FOR THIN-FILM METALLIZATIONS AND BARRIER LAYERS COMMONLY USED IN THE MICROELECTRONICS INDUSTRY
    GRIFFIN, AJ
    HERNANDEZ, SE
    BROTZEN, FR
    DUNN, CF
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (03) : 807 - 809
  • [22] Thin-film temperature sensors with grid-type circuits for temperature distribution measurements
    Ahn, Ju -Hun
    Kim, Han -Na
    Lee, Chang-Yull
    SENSORS AND ACTUATORS A-PHYSICAL, 2024, 365
  • [23] Thin-film resistance temperature detector array for the measurement of temperature distribution inside a phantom
    Sim, Jai Kyoung
    Hyun, Jaeyub
    Doh, Il
    Ahn, Bongyoung
    Kim, Yong Tae
    METROLOGIA, 2018, 55 (01) : L5 - L11
  • [24] THIN-FILM TEMPERATURE HEAT FLUXMETERS
    GODEFROY, JC
    CLERY, M
    GAGEANT, C
    FRANCOIS, D
    SERVOUZE, Y
    THIN SOLID FILMS, 1990, 193 (1-2) : 924 - 934
  • [25] THIN-FILM THERMOMETER FOR CRYOGENIC TEMPERATURE
    YOTSUYA, T
    YOSHITAKE, M
    OGAWA, S
    SUZUKI, Y
    YAMAMOTO, J
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 : 1743 - 1744
  • [26] MECHANICAL-PROPERTIES AND MICROSTRUCTURES OF AL-1-PERCENT-SI THIN-FILM METALLIZATIONS
    GRIFFIN, AJ
    BROTZEN, FR
    DUNN, CF
    THIN SOLID FILMS, 1987, 150 (2-3) : 237 - 244
  • [27] Dynamics of the temperature distribution in ultra-fast thin-film calorimeter sensors
    Minakov, Alexander A.
    Schick, Christoph
    THERMOCHIMICA ACTA, 2015, 603 : 205 - 217
  • [28] Measuring thin film stress in metallizations and passivations
    Turio, J
    SOLID STATE TECHNOLOGY, 1996, : S3 - &
  • [29] A micromechanical model for coupled interaction of thermo mechanical and corrosion fatigue in microelectronics thin-film metallizations
    Shodja, HM
    SURFACE TREATMENT V: COMPUTER METHODS AND EXPERIMENTAL MEASUREMENTS, 2001, 6 : 429 - 438
  • [30] MEASUREMENT OF THERMAL-EXPANSION COEFFICIENTS OF W, WSI, WN, AND WSIN THIN-FILM METALLIZATIONS
    LAHAV, A
    GRIM, KA
    BLECH, IA
    JOURNAL OF APPLIED PHYSICS, 1990, 67 (02) : 734 - 738
12345