SULFUR INCORPORATION DURING EPITAXIAL-GROWTH OF INP IN THE IN-HCL-PH3-H2 SYSTEM

被引：5
|
作者：
GRUNDMANN, D [1 ]
JURGENSEN, H [1 ]
HEYEN, M [1 ]
KOREC, J [1 ]
BALK, P [1 ]
机构：
[1] AACHEN TECH UNIV,SONDERFORCH BEREICH 202,D-5100 AACHEN,FED REP GER
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1985年 / 14卷 / 06期
关键词：
D O I：
10.1007/BF02654309
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
9
引用
收藏
页码：749 / 767
页数：19
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