SULFUR INCORPORATION DURING EPITAXIAL-GROWTH OF INP IN THE IN-HCL-PH3-H2 SYSTEM

被引：5

作者：

GRUNDMANN, D ^{[1
]}

JURGENSEN, H ^{[1
]}

HEYEN, M ^{[1
]}

KOREC, J ^{[1
]}

BALK, P ^{[1
]}

机构：

[1] AACHEN TECH UNIV,SONDERFORCH BEREICH 202,D-5100 AACHEN,FED REP GER

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1985年 / 14卷 / 06期

关键词：

D O I：

10.1007/BF02654309

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：749 / 767

页数：19

共 50 条

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