CHARACTERIZATION OF SILICON-COMPOUNDS USING THE AUGER PARAMETER IN X-RAY PHOTOELECTRON-SPECTROSCOPY (XPS)

被引：29

作者：

KOHIKI, S ^{[1
]}

OZAKI, S ^{[1
]}

HAMADA, T ^{[1
]}

TANIGUCHI, K ^{[1
]}

机构：

[1] OSAKA ELECTROCOMMUN UNIV,DEPT SOLID STATE ELECTR,NEYAGAWA,OSAKA 572,JAPAN

来源：

APPLIED SURFACE SCIENCE | 1987年 / 28卷 / 02期

关键词：

D O I：

10.1016/0169-4332(87)90057-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：103 / 110

页数：8

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