ACCELERATED DIFFUSION OF PHOSPHORUS IN SILICON

被引：0
|
作者：
PITANOV, VS
KORNFELD, IN
ILINA, TN
机构：
来源：
INORGANIC MATERIALS | 1984年 / 20卷 / 09期
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：1361 / 1362
页数：2
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