SIMULTANEOUS DIFFUSION OF PHOSPHORUS AND ANTIMONY IN SILICON

被引：0
|
作者：
KOLEDOV, LA [1 ]
POPOVA, RB [1 ]
机构：
[1] MOSCOW ELECT TECHNOL INST,MOSCOW,USSR
来源：
SOVIET PHYSICS SEMICONDUCTORS-USSR | 1973年 / 7卷 / 12期
关键词：
D O I：
暂无
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
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页码：1568 / 1569
页数：2
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