NONSWELLING NEGATIVE RESISTS INCORPORATING CHEMICAL AMPLIFICATION - THE ELECTROPHILIC AROMATIC-SUBSTITUTION APPROACH

被引：0
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作者：
FRECHET, JMJ
MATUSZCZAK, S
STOVER, HDH
WILLSON, CG
RECK, B
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来源：
POLYMERS IN MICROLITHOGRAPHY: MATERIALS AND PROCESSES | 1989年 / 412卷
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中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
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页码：74 / 85
页数：12
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