PLASMA-ETCHING OF NONOXIDE CERAMICS

被引：3
|
作者：
MITOMO, M
SATO, Y
YASHIMA, I
TSUTSUMI, M
机构：
[1] National Institute for Research in Inorganic Materials, Ibaraki, 305, 1-1, Namiki, Tsukuba-shi
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1991年 / 10卷 / 02期
关键词：
D O I：
10.1007/BF00721916
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：83 / 84
页数：2
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