PLASMA-ETCHING OF NONOXIDE CERAMICS

被引：3

作者：

MITOMO, M

SATO, Y

YASHIMA, I

TSUTSUMI, M

机构：

[1] National Institute for Research in Inorganic Materials, Ibaraki, 305, 1-1, Namiki, Tsukuba-shi

来源：

关键词：

D O I：

10.1007/BF00721916

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：83 / 84

页数：2

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