DECOMPOSITION KINETICS OF SUPERSATURATED SOLID-SOLUTIONS IN ION-IMPLANTED SILICON

被引：2

作者：

CAMPISANO, SU ^{[1
]}

BARBARINO, AE ^{[1
]}

GALLONI, R ^{[1
]}

RIZZOLI, R ^{[1
]}

机构：

[1] CNR,LAMEL,I-40126 BOLOGNA,ITALY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

D O I：

10.1016/0167-5087(83)90861-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：645 / 650

页数：6

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