DECOMPOSITION KINETICS OF SUPERSATURATED SOLID-SOLUTIONS IN ION-IMPLANTED SILICON

被引：2
|
作者：
CAMPISANO, SU [1 ]
BARBARINO, AE [1 ]
GALLONI, R [1 ]
RIZZOLI, R [1 ]
机构：
[1] CNR,LAMEL,I-40126 BOLOGNA,ITALY
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期
关键词：
D O I：
10.1016/0167-5087(83)90861-X
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：645 / 650
页数：6
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