GLOW-DISCHARGE CHARACTERISTICS OF IMPORTANCE IN LOW-PRESSURE PLASMA TECHNIQUES

被引：0
|
作者：
HOLLAND, L [1 ]
机构：
[1] UNIV SUSSEX,PLASMA MAT PROC UNIT,BRIGHTON BN1 9QH,E SUSSEX,ENGLAND
来源：
VACUUM | 1984年 / 34卷 / 3-4期
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：487 / 487
页数：1
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