GLOW-DISCHARGE CHARACTERISTICS OF IMPORTANCE IN LOW-PRESSURE PLASMA TECHNIQUES

被引：0
|
作者：
HOLLAND, L [1 ]
机构：
[1] UNIV SUSSEX,PLASMA MAT PROC UNIT,BRIGHTON BN1 9QH,E SUSSEX,ENGLAND
来源：
VACUUM | 1984年 / 34卷 / 3-4期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：487 / 487
页数：1
相关论文
共 50 条
  • [21] HYDROGENATED AMORPHOUS-SILICON FILMS OBTAINED BY A LOW-PRESSURE DC GLOW-DISCHARGE
    DELGADO, JC
    ANDREU, J
    SARDIN, G
    ESTEVE, J
    MORENZA, JL
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1988, 46 (03): : 207 - 213
  • [22] QUENCHING AND EXCITATION TRANSFER IN THE N=3 HELIUM SUBLEVELS IN A LOW-PRESSURE GLOW-DISCHARGE
    DUBREUIL, B
    CATHERINOT, A
    PHYSICAL REVIEW A, 1980, 21 (01): : 188 - 199
  • [23] The nonlocal electron kinetics for a low-pressure glow discharge dusty plasma
    Liang, Yonggan
    Wang, Ying
    Li, Hui
    Tian, Ruihuan
    Yuan, Chengxun
    Kudryavtsev, A. A.
    Rabadanov, K. M.
    Wu, Jian
    Zhou, Zhongxiang
    Tian, Hao
    PHYSICS OF PLASMAS, 2018, 25 (05)
  • [24] Decomposition Characteristics of an Artificial Biogas in a Low-Pressure DC Glow Discharge
    Itoh, Yasuhiro
    Oshita, Takamasa
    Satoh, Kohki
    Itoh, Hidenori
    ELECTRICAL ENGINEERING IN JAPAN, 2014, 186 (01) : 26 - 33
  • [25] Characteristics of surface glow discharge in a low-pressure supersonic gas flow
    I. V. Schweigert
    Journal of Experimental and Theoretical Physics, 2010, 110 : 498 - 503
  • [26] Cathode layer characteristics of a low-pressure glow discharge in argon and nitrogen
    Lisovskii, VA
    Yakovin, SD
    TECHNICAL PHYSICS LETTERS, 2000, 26 (10) : 891 - 893
  • [27] Characteristics of surface glow discharge in a low-pressure supersonic gas flow
    Schweigert, I. V.
    JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 2010, 110 (03) : 498 - 503
  • [28] Cathode layer characteristics of a low-pressure glow discharge in argon and nitrogen
    V. A. Lisovskii
    S. D. Yakovin
    Technical Physics Letters, 2000, 26 : 891 - 893
  • [29] PLASMA POLYMERIZATION BY MAGNETRON GLOW-DISCHARGE .1. EFFECT OF MAGNETIC-FIELD ON BREAKDOWN OF MONOMERS IN LOW-PRESSURE
    SATO, K
    IRIYAMA, Y
    CHO, DL
    YASUDA, H
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02): : 195 - 201
  • [30] THE EFFECT OF THE NATURE OF LOW-PRESSURE GLOW-DISCHARGE WORKING GAS ON THE RATE OF RADICAL ACCUMULATION PROCESS IN PLASMA TREATMENT OF POLYTETRAFLUOROETHYLENE
    BAIDAROVTSEV, YP
    VASILETS, VN
    PONOMAREV, AN
    KHIMICHESKAYA FIZIKA, 1985, 4 (01): : 89 - 96
12345