GLOW-DISCHARGE CHARACTERISTICS OF IMPORTANCE IN LOW-PRESSURE PLASMA TECHNIQUES

被引：0

作者：

HOLLAND, L ^{[1
]}

机构：

[1] UNIV SUSSEX,PLASMA MAT PROC UNIT,BRIGHTON BN1 9QH,E SUSSEX,ENGLAND

来源：

VACUUM | 1984年 / 34卷 / 3-4期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：487 / 487

页数：1

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