MODEL FOR GAS-LASER INTERACTION - APPLICATION TO THERMALLY ACTIVATED LASER-INDUCED CHEMICAL VAPOR-DEPOSITION

被引:5
|
作者
PAN, ETS
FLINT, JH
LIANG, JM
ADLER, D
HAGGERTY, JS
机构
来源
APPLIED OPTICS | 1987年 / 26卷 / 01期
关键词
D O I
10.1364/AO.26.000070
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:70 / 75
页数:6
相关论文
共 50 条
  • [21] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF SIO2
    BOYER, PK
    ROCHE, GA
    RITCHIE, WH
    COLLINS, GJ
    APPLIED PHYSICS LETTERS, 1982, 40 (08) : 716 - 719
  • [22] SYNTHESIS OF DIAMOND FILMS BY LASER-INDUCED CHEMICAL VAPOR-DEPOSITION
    GOTO, Y
    YAGI, T
    NAGAI, H
    LASER- AND PARTICLE-BEAM CHEMICAL PROCESSES ON SURFACES, 1989, 129 : 213 - 217
  • [23] EXCIMER LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF TITANIUM SILICIDE
    GUPTA, A
    WEST, GA
    BEESON, KW
    JOURNAL OF APPLIED PHYSICS, 1985, 58 (09) : 3573 - 3582
  • [24] MODULATED LASER-BEAM RELAXATION SPECTROMETRY OF LASER-INDUCED CHEMICAL VAPOR-DEPOSITION
    COMITA, PB
    KODAS, TT
    APPLIED PHYSICS LETTERS, 1987, 51 (24) : 2059 - 2061
  • [25] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF SILICON-NITRIDE FILMS
    PAN, ETS
    FLINT, JH
    ADLER, D
    HAGGERTY, JS
    JOURNAL OF ELECTRONIC MATERIALS, 1986, 15 (05) : 296 - 296
  • [26] CHEMICAL VAPOR-DEPOSITION OF GERMANIUM FILMS BY LASER-INDUCED PHOTOLYSIS OF ETHYLGERMANES
    POLA, J
    PARSONS, JP
    TAYLOR, R
    JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS, 1992, 88 (12): : 1637 - 1641
  • [27] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF HIGH-PURITY METALS
    BAUM, TH
    LARSON, CE
    HIGH TEMPERATURE SCIENCE, 1989, 27 : 237 - 249
  • [28] THICKNESS CONTROL OF MULTILAYER FILMS IN LASER-INDUCED CHEMICAL VAPOR-DEPOSITION
    MUTOH, K
    YAMADA, Y
    IWABUCHI, T
    MIYATA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (04): : 1183 - 1184
  • [29] NEW TYPES OF PERIODIC STRUCTURES IN LASER-INDUCED CHEMICAL VAPOR-DEPOSITION
    DU, YC
    KEMPFER, U
    PIGLMAYER, K
    BAUERLE, D
    TITULAER, UM
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 39 (03): : 167 - 171
  • [30] CONVECTION AND MASS-TRANSPORT IN LASER-INDUCED CHEMICAL VAPOR-DEPOSITION
    PATNAIK, S
    BROWN, RA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (03) : 697 - 706