MEASUREMENT OF ANGLE AND FORM DEVIATIONS ON MIRROR POLYGON FACES USING A PHASE INTERFEROMETER

被引：0
|
作者：
PROBST, R
KUNZMANN, H
机构：
来源：
PTB-MITTEILUNGEN | 1993年 / 103卷 / 01期
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The application of a phase-shifting interferometer for simultaneous measurements of angle and form of mirror polygon faces is described. Investigations have been performed to directly compare measurements made with the interferometer with those carried out with an electronic autocollimator. A correlation between the differences of these measurements and the form deviations of the faces from the mean could be proved. For deviations below 6 nm (RMS) the differences were within +/- 0,02''.
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页码：43 / 50
页数：8
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