MEASUREMENT OF ANGLE AND FORM DEVIATIONS ON MIRROR POLYGON FACES USING A PHASE INTERFEROMETER

被引：0
|
作者：
PROBST, R
KUNZMANN, H
机构：
来源：
PTB-MITTEILUNGEN | 1993年 / 103卷 / 01期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The application of a phase-shifting interferometer for simultaneous measurements of angle and form of mirror polygon faces is described. Investigations have been performed to directly compare measurements made with the interferometer with those carried out with an electronic autocollimator. A correlation between the differences of these measurements and the form deviations of the faces from the mean could be proved. For deviations below 6 nm (RMS) the differences were within +/- 0,02''.
引用
收藏
页码：43 / 50
页数：8
相关论文
共 50 条
  • [31] Phase extraction formula for glass thickness measurement using Fizeau interferometer
    Wonjun Bae
    Yangjin Kim
    Journal of Mechanical Science and Technology, 2021, 35 : 1623 - 1632
  • [32] Unambiguous measurement of surface profile using a Sagnac interferometer with phase feedback
    Somervell, ARD
    Barnes, TH
    OPTICS COMMUNICATIONS, 1998, 150 (1-6) : 61 - 65
  • [33] WAVEFRONT EVALUATION ON LASER-DIODES USING A PHASE MEASUREMENT INTERFEROMETER
    LEUNG, KM
    LANGE, SR
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 429 : 27 - 34
  • [34] Vibration distribution measurement using downsampling phase-shifting interferometer
    Ohara, Yuta
    Suzuki, Takamasa
    Choi, Samuel
    Sasaki, Osami
    OPTICAL ENGINEERING, 2020, 59 (03)
  • [35] Measurement of shock waves using phase shifting pulsed holographic interferometer
    Kang, YJ
    Baik, SH
    Ryu, WJ
    Kim, KS
    OPTICS AND LASER TECHNOLOGY, 2003, 35 (05): : 323 - 329
  • [36] Movement measurement with a grating interferometer using sinusoidal phase-modulation
    Huan, Hai
    Sasaki, Osami
    Suzuki, Takamasa
    OPTICS COMMUNICATIONS, 2006, 267 (02) : 341 - 346
  • [37] A new method for laser beam phase measurement by using the shear interferometer
    Wang, YJ
    Huang, YB
    Bi, ZB
    ADAPTIVE OPTICS AND APPLICATIONS III, 2004, 5639 : 83 - 86
  • [38] SINUSOIDAL PHASE MODULATING INTERFEROMETER USING OPTICAL FIBERS FOR DISPLACEMENT MEASUREMENT
    SASAKI, O
    TAKAHASHI, K
    APPLIED OPTICS, 1988, 27 (19): : 4139 - 4142
  • [39] Dynamic phase measurement using two-window carrier interferometer
    Diao, Ming
    Hao, Ben-Gong
    Zhong, Zhi
    Shan, Ming-Guang
    Guangdianzi Jiguang/Journal of Optoelectronics Laser, 2014, 25 (11): : 2141 - 2145
  • [40] Displacement measurement using a wavelength-phase-shifting grating interferometer
    Lee, Ju-Yi
    Jiang, Geng-An
    OPTICS EXPRESS, 2013, 21 (21): : 25553 - 25564
12345