PLASMA STIMULATED MOCVD OF GAAS

被引:35
|
作者
HEINECKE, H [1 ]
BRAUERS, A [1 ]
LUTH, H [1 ]
BALK, P [1 ]
机构
[1] RHEIN WESTFAL TH AACHEN,SONDERFORSCH BEREICH 202,D-5100 AACHEN,FED REP GER
关键词
D O I
10.1016/0022-0248(86)90308-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:241 / 249
页数:9
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