X-RAY TOPOGRAPHIC STUDIES OF DEFECTS IN SILICON INTRODUCED BY THERMAL OXIDATION

被引：0
|
作者：
SUGITA, Y
TOKUYAMA, T
KISHINO, S
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1966年 / 113卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C216 / &
相关论文
共 50 条
  • [1] X-RAY TOPOGRAPHIC STUDIES OF DEFECTS IN SILICON DURING THERMAL OXIDATION
    TONCHEVA, LT
    VASSILEV, IS
    DOKLADI NA BOLGARSKATA AKADEMIYA NA NAUKITE, 1974, 27 (08): : 1045 - 1048
  • [2] X-RAY TOPOGRAPHIC STUDY OF OXIDATION OF SILICON
    VALE, RJ
    BALL, A
    JOURNAL OF ELECTRONIC MATERIALS, 1977, 6 (06) : 735 - 735
  • [3] X-RAY TOPOGRAPHIC STUDY OF DEFECTS IN ANNEALED SILICON
    GRONKOWSKI, J
    LEFELDSOSNOWSKA, M
    ZIELINSKAROHOZINSKA, E
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (4A) : A62 - A64
  • [4] CORRELATION OF X-RAY TOPOGRAPHIC AND CATHODOLUMINESCENCE TOPOGRAPHIC STUDIES OF DEFECTS IN DIAMONDS
    KIFLAWI, I
    LANG, AR
    ACTA CRYSTALLOGRAPHICA SECTION A, 1975, 31 : S258 - S258
  • [5] X-RAY TOPOGRAPHIC AND X-RAY MICROANALYTICAL STUDIES ON DIFFUSION OF GOLD IN SILICON
    BRUMMER, O
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 5 (01): : 199 - &
  • [6] AN X-RAY TOPOGRAPHIC STUDY OF D-DEFECTS IN SILICON
    VYSOTSKAYA, VV
    GORIN, SN
    SOROKIN, LM
    SHEIKHET, EG
    FIZIKA TVERDOGO TELA, 1987, 29 (06): : 1858 - 1861
  • [7] TOPOGRAPHIC STUDIES OF AN X-RAY INTERFEROMETER OF CZOCHRALSKI-SILICON
    DIETRICH, B
    KITTNER, R
    ZAUMSEIL, P
    GROSSWIG, S
    KRISTALL UND TECHNIK-CRYSTAL RESEARCH AND TECHNOLOGY, 1980, 15 (08): : 933 - 936
  • [8] X-RAY TOPOGRAPHIC STUDIES OF AS-GROWN DEFECTS IN NATURAL MUSCOVITE
    CORNY, F
    BARONNET, A
    JOURDAN, C
    JOURNAL OF CRYSTAL GROWTH, 1976, 34 (02) : 304 - 315
  • [9] X-RAY TOPOGRAPHIC STUDY OF DEFECTS IN OLIVINE CRYSTALS
    SLIND, TJ
    SORUM, H
    JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1976, 9 (FEB1) : 39 - 41
  • [10] X-RAY TOPOGRAPHIC DEFECTS CONTRAST ON SYNTHETIC QUARTZ
    CHIRILA, R
    CSIKI, Z
    CRYSTAL RESEARCH AND TECHNOLOGY, 1993, 28 (05) : 615 - 621
12345