A NEW ION DOSE UNIFORMITY MEASUREMENT TECHNIQUE

被引：0
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作者：
CHENG, JC
TRIPP, GR
机构：
来源：
SOLID STATE TECHNOLOGY | 1983年 / 26卷 / 11期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：143 / 152
页数：10
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