A NEW ION DOSE UNIFORMITY MEASUREMENT TECHNIQUE

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作者：

CHENG, JC

TRIPP, GR

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来源：

SOLID STATE TECHNOLOGY | 1983年 / 26卷 / 11期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：143 / 152

页数：10

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