PRECISE AND RAPID MEASUREMENT OF OXYGEN AND CARBON CONCENTRATIONS IN SILICON

被引：0
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作者：
KRISHNAN, K [1 ]
机构：
[1] DIGILAB,CAMBRIDGE,MA 02139
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 03期
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D O I：
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C92 / C92
页数：1
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