EFFECT OF SILANE DILUTION ON INTRINSIC STRESS IN GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON FILMS

被引：63
|
作者：
HARBISON, JP
WILLIAMS, AJ
LANG, DV
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期
关键词：
D O I：
10.1063/1.333148
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：946 / 951
页数：6
相关论文
共 50 条
  • [41] DC MAGNETRON GLOW-DISCHARGE AMORPHOUS-SILICON
    SMITH, GB
    MCKENZIE, DR
    SOLAR ENERGY MATERIALS, 1984, 11 (1-2): : 45 - 56
  • [42] THE EFFECT OF FILM THICKNESS ON THE REFLECTIVITY OF GLOW-DISCHARGE AMORPHOUS-SILICON
    DONNADIEU, A
    WEISER, G
    BEICHLER, J
    SOLAR ENERGY MATERIALS, 1981, 4 (04): : 455 - 459
  • [43] ELECTROPHOTOGRAPHIC STUDIES OF GLOW-DISCHARGE AMORPHOUS-SILICON
    ODA, S
    SAITO, Y
    SHIMIZU, I
    INOUE, E
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 43 (06): : 1079 - 1089
  • [44] LASER ANNEALING OF GLOW-DISCHARGE AMORPHOUS-SILICON
    SUSSMANN, RS
    HARRIS, AJ
    OGDEN, R
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 249 - 254
  • [45] HOT PLASMA BOX GLOW-DISCHARGE REACTOR FOR PRODUCTION OF UNIFORM FILMS OF HYDROGENATED AMORPHOUS-SILICON ALLOYS
    BHUSARI, DM
    KALE, L
    KUMBHAR, A
    SABANE, S
    KSHIRSAGAR, ST
    THIN SOLID FILMS, 1991, 197 (1-2) : 215 - 224
  • [46] PROPERTIES OF FLUORINATED GLOW-DISCHARGE AMORPHOUS-SILICON
    JANAI, M
    WEIL, R
    PRATT, B
    PHYSICAL REVIEW B, 1985, 31 (08): : 5311 - 5321
  • [47] AN OPTICAL-EMISSION STUDY OF THE GLOW-DISCHARGE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FROM ARGON-SILANE MIXTURES
    KAMPAS, FJ
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) : 2276 - 2280
  • [48] DENSITY OF GLOW-DISCHARGE AMORPHOUS-SILICON FILMS DETERMINED BY SPECTROSCOPIC ELLIPSOMETRY
    HAAGE, T
    SCHMIDT, UI
    FATH, H
    HESS, P
    SCHRODER, B
    OECHSNER, H
    JOURNAL OF APPLIED PHYSICS, 1994, 76 (08) : 4894 - 4896
  • [49] AC CONDUCTION OF THE HEAVILY DOPED GLOW-DISCHARGE AMORPHOUS-SILICON FILMS
    NITTA, S
    SHIMAKAWA, K
    NONOMURA, S
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 339 - 344
  • [50] HYDROGEN CONTENT AND MECHANICAL-STRESS IN GLOW-DISCHARGE AMORPHOUS-SILICON
    PADUSCHEK, P
    EICHINGER, P
    KRISTEN, G
    MITLEHNER, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 199 (1-2): : 421 - 425
12345