EFFECT OF SILANE DILUTION ON INTRINSIC STRESS IN GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON FILMS

被引：63
|
作者：
HARBISON, JP
WILLIAMS, AJ
LANG, DV
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期
关键词：
D O I：
10.1063/1.333148
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：946 / 951
页数：6
相关论文
共 50 条
  • [31] ELECTRICAL-PROPERTIES OF BORON-DOPED HYDROGENATED AMORPHOUS-SILICON FILMS PREPARED BY GLOW-DISCHARGE DECOMPOSITION IN DILUTE SILANE
    PANWAR, OS
    DIXIT, PN
    TYAGI, A
    SETH, T
    SATYANARAYAN, BS
    BHATTACHARYYA, R
    SHAH, VV
    THIN SOLID FILMS, 1989, 176 (01) : 79 - 90
  • [32] CRYSTALLIZATION OF PHOSPHORUS-DOPED AMORPHOUS-SILICON FILMS PREPARED BY GLOW-DISCHARGE DECOMPOSITION OF SILANE
    SQUELARD, S
    ZELLAMA, K
    GERMAIN, P
    BOURDON, B
    REVUE DE PHYSIQUE APPLIQUEE, 1981, 16 (12): : 657 - 662
  • [33] OXIDATION AND STRESS RELIEF IN AIR AT ROOM-TEMPERATURE OF AMORPHOUS-SILICON HYDROGENATED IN A GLOW-DISCHARGE
    YOKOTA, K
    KAGEYAMA, T
    KATAYAMA, S
    SOLID-STATE ELECTRONICS, 1985, 28 (09) : 893 - &
  • [34] EQUILIBRIUM TEMPERATURE AND RELATED DEFECTS IN INTRINSIC GLOW-DISCHARGE AMORPHOUS-SILICON
    MCMAHON, TJ
    TSU, R
    APPLIED PHYSICS LETTERS, 1987, 51 (06) : 412 - 414
  • [35] DEPOSITION OF AMORPHOUS SILICON FILMS FROM GLOW-DISCHARGE PLASMAS OF SILANE
    BRODSKY, MH
    THIN SOLID FILMS, 1977, 40 (JAN) : L23 - L25
  • [36] HYDROGENATED AMORPHOUS-SILICON GERMANIUM ALLOYS PREPARED BY TRIODE RF GLOW-DISCHARGE
    ICHIMURA, T
    IHARA, T
    HAMA, T
    OHSAWA, M
    SAKAI, H
    UCHIDA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (04): : L276 - L278
  • [37] A STUDY OF HYDROGENATED AMORPHOUS-SILICON DEPOSITED BY HOT-WALL GLOW-DISCHARGE
    BOULITROP, F
    PROUST, N
    MAGARINO, J
    CRITON, E
    PERAY, JF
    DUPRE, M
    JOURNAL OF APPLIED PHYSICS, 1985, 58 (09) : 3494 - 3498
  • [38] PICOSECOND CARRIER DYNAMICS IN OPTICALLY ILLUMINATED GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON
    KOMURO, S
    AOYAGI, Y
    SEGAWA, Y
    NAMBA, S
    MASUYAMA, A
    OKAMOTO, H
    HAMAKAWA, Y
    APPLIED PHYSICS LETTERS, 1983, 42 (01) : 79 - 81
  • [39] GLOW-DISCHARGE PREPARATION OF HYDROGENATED AMORPHOUS-SILICON FROM DISILANE AND HIGHER SILANES
    SCOTT, BA
    BRODSKY, MH
    KIRBY, PB
    PLECENIK, RM
    GREEN, DC
    SIMONYI, EE
    KUCZA, J
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (03): : 294 - 294
  • [40] Hydrogenated amorphous silicon films by 60 Hz glow-discharge deposition
    1600, (74):
12345