EFFECT OF SILANE DILUTION ON INTRINSIC STRESS IN GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON FILMS

被引：63

|

作者：

HARBISON, JP

WILLIAMS, AJ

LANG, DV

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.333148

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：946 / 951

页数：6

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