DIRECT-WRITE PYROLYTIC LASER DEPOSITION

被引:0
|
作者
ALLEN, SD
机构
来源
IEEE CIRCUITS & DEVICES | 1986年 / 2卷 / 01期
关键词
D O I
10.1109/MCD.1986.6311768
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:32 / 36
页数:5
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