DIRECT-WRITE PYROLYTIC LASER DEPOSITION

被引:0
|
作者
ALLEN, SD
机构
来源
IEEE CIRCUITS & DEVICES | 1986年 / 2卷 / 01期
关键词
D O I
10.1109/MCD.1986.6311768
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:32 / 36
页数:5
相关论文
共 50 条
  • [21] Applications of laser direct-write for embedding microelectronics
    Pique, Alberto
    Charipar, Nicholas A.
    Kim, Heungsoo
    Auyeung, Ray C. Y.
    Mathews, Scott A.
    ADVANCED LASER TECHNOLOGIES 2006, 2007, 6606
  • [22] STUDY ON MICROPEN DIRECT-WRITE DEPOSITION OF POLYIMIDE PATTERNS
    Cao Yu
    Wang Xiaoye
    Zhou Langwen
    Jin Xi
    Zeng Xiaoyan
    ACTA POLYMERICA SINICA, 2009, (05) : 489 - 492
  • [23] Laser direct-write techniques for printing of complex materials
    Arnold, Craig B.
    Serra, Pere
    Pique, Alberto
    MRS BULLETIN, 2007, 32 (01) : 23 - 31
  • [24] Femtosecond Laser Direct-Write Plasmonic Nanolithography in Dielectrics
    Zhu, Han
    Wu, Bo
    Gao, Mingsheng
    Ren, Feng
    Qin, Wei
    Juodkazis, Saulius
    Chen, Feng
    SMALL SCIENCE, 2022, 2 (09):
  • [25] DIRECT-WRITE SCANNED LASER DOES SUBMICRON LITHOGRAPHY
    BURSKY, D
    ELECTRONIC DESIGN, 1990, 38 (06) : 28 - +
  • [26] Rapid prototyping of micropower sources by laser direct-write
    A. Piqué
    C.B. Arnold
    H. Kim
    M. Ollinger
    T.E. Sutto
    Applied Physics A, 2004, 79 : 783 - 786
  • [27] Development of Blue Laser Direct-Write Lithography System
    Chang, Hao-Wen
    Lee, Hau-Wei
    Lin, Chorng-Tyan
    Wen, Zhi-Qun
    INTERNATIONAL JOURNAL OF ENGINEERING AND TECHNOLOGY INNOVATION, 2012, 2 (01) : 63 - 71
  • [28] Direct-write subwavelength structuring with femtosecond laser pulses
    Koch, J
    Korte, F
    Fallnich, C
    Ostendorf, A
    Chichkov, BN
    OPTICAL ENGINEERING, 2005, 44 (05) : 1 - 5
  • [29] Laser direct-write of metal patterns for interconnects and antennas
    Piqué, A
    Arnold, CB
    Pratap, B
    Auyeung, RCY
    Kim, HS
    Weir, DW
    PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS II, 2003, 4977 : 602 - 608
  • [30] OPTICALLY INDUCED BIFURCATIONS IN LASER DIRECT-WRITE METALLIZATION
    PRICE, PE
    JENSEN, KF
    CHEMICAL ENGINEERING SCIENCE, 1990, 45 (08) : 2511 - 2518