CAPILLARY INSTABILITIES IN THIN-FILMS

被引:244
|
作者
JIRAN, E
THOMPSON, CV
机构
[1] Department of Materials Science and Engineering, M.I.T., Cambridge, 02138, MA
关键词
AU THIN FILMS; AGGLOMERATION; CAPILLARY INSTABILITIES;
D O I
10.1007/BF02673327
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Very thin films, less than 100 nm-thick, are used in a variety of applications, including as catalysts and for thin film reactions to form patterned silicides in electronic devices. Because of their high surface to volume ratio, these very thin films are subject to capillary instability and can agglomerate well below their melting temperatures. In order to develop a general understanding of agglomeration in very thin films, we have studied initially continuous and patterned films of gold on fused silica substrates. Two in situ techniques were used to monitor agglomeration: 1) heating and video recording in a transmission electron microscope, and 2) measurement of the intensity of laser light transmitted through a sample heated in a furnace. Electron microscopy allowed investigation of the role of the microstructure of the Au film and analysis of light transmission during heating allowed determination of temperature-dependent and film-thickness-dependent agglomeration rates. These results will be described along with models for the agglomeration process.
引用
收藏
页码:1153 / 1160
页数:8
相关论文
共 50 条
  • [41] INTERFERENCE IN THIN-FILMS
    BASSANINI, P
    SIAM REVIEW, 1986, 28 (03) : 381 - 384
  • [42] ORGANIC THIN-FILMS
    KAY, E
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (06): : 1294 - 1294
  • [43] FERROELECTRIC THIN-FILMS
    TOSSELL, DA
    PATEL, A
    ADVANCED MATERIALS, 1992, 4 (12) : 816 - 818
  • [44] ADHESION OF THIN-FILMS
    OZENBAS, M
    TAN, C
    JOURNAL OF CRYSTAL GROWTH, 1986, 78 (03) : 519 - 522
  • [45] ELECTRODISPERSION OF THIN-FILMS
    AVDEEVA, LA
    PEROV, PI
    ELINSON, MI
    KYARGINSKAYA, LG
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1973, 16 (01): : 323 - 328
  • [46] INTERDIFFUSION IN THIN-FILMS
    TU, KN
    ANNUAL REVIEW OF MATERIALS SCIENCE, 1985, 15 : 147 - 176
  • [47] INTERFACES AND THIN-FILMS
    不详
    CHEMTECH, 1990, 20 (05) : 290 - 295
  • [48] ORGANIC THIN-FILMS
    KAY, E
    THIN SOLID FILMS, 1979, 58 (02) : 298 - 298
  • [49] Instabilities in thin polymer films
    Miron, C
    Simion, F
    MATERIALE PLASTICE, 2004, 41 (03) : 185 - 187
  • [50] Instabilities in the flow of thin films
    Diez, J.
    Kondic, L.
    International Journal of Heat and Technology, 2003, 21 (01) : 31 - 36