CAPILLARY INSTABILITIES IN THIN-FILMS

被引:244
|
作者
JIRAN, E
THOMPSON, CV
机构
[1] Department of Materials Science and Engineering, M.I.T., Cambridge, 02138, MA
关键词
AU THIN FILMS; AGGLOMERATION; CAPILLARY INSTABILITIES;
D O I
10.1007/BF02673327
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Very thin films, less than 100 nm-thick, are used in a variety of applications, including as catalysts and for thin film reactions to form patterned silicides in electronic devices. Because of their high surface to volume ratio, these very thin films are subject to capillary instability and can agglomerate well below their melting temperatures. In order to develop a general understanding of agglomeration in very thin films, we have studied initially continuous and patterned films of gold on fused silica substrates. Two in situ techniques were used to monitor agglomeration: 1) heating and video recording in a transmission electron microscope, and 2) measurement of the intensity of laser light transmitted through a sample heated in a furnace. Electron microscopy allowed investigation of the role of the microstructure of the Au film and analysis of light transmission during heating allowed determination of temperature-dependent and film-thickness-dependent agglomeration rates. These results will be described along with models for the agglomeration process.
引用
收藏
页码:1153 / 1160
页数:8
相关论文
共 50 条
  • [1] CAPILLARY INSTABILITIES IN THIN-FILMS .2. KINETICS
    SROLOVITZ, DJ
    SAFRAN, SA
    JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) : 255 - 260
  • [2] CAPILLARY INSTABILITIES IN THIN-FILMS .1. ENERGETICS
    SROLOVITZ, DJ
    SAFRAN, SA
    JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) : 247 - 254
  • [3] CAPILLARY INSTABILITIES IN THIN, CONTINUOUS FILMS
    JIRAN, E
    THOMPSON, CV
    THIN SOLID FILMS, 1992, 208 (01) : 23 - 28
  • [4] CAPILLARY INSTABILITIES IN THIN-FILMS - A MODEL OF THERMAL PITTING AT GRAIN-BOUNDARY VERTICES
    GENIN, FY
    MULLINS, WW
    WYNBLATT, P
    ACTA METALLURGICA ET MATERIALIA, 1992, 40 (12): : 3239 - 3248
  • [5] Capillary instabilities in solid thin films: Lines
    McCallum, MS
    Voorhees, PW
    Miksis, MJ
    Davis, SH
    Wong, H
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (10) : 7604 - 7611
  • [6] ELECTRONIC INSTABILITIES IN POLYPHTHALIDILIDENARYLENE THIN-FILMS - POSSIBLE APPLICATIONS
    LACHINOV, AN
    ZHEREBOV, AY
    SCALDIN, OA
    SYNTHETIC METALS, 1991, 41 (03) : 805 - 809
  • [7] ELECTRONIC CONDUCTION AND INSTABILITIES IN THIN-FILMS OF AMORPHOUS-SILICON DIOXIDE
    DELIMA, JJ
    KRISHNA, KV
    OWEN, AE
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1986, 53 (02): : 115 - 131
  • [8] CAPILLARY INSTABILITIES IN POLYCRYSTALLINE FILMS
    SROLOVITZ, DJ
    SAFRAN, SA
    JOURNAL OF METALS, 1984, 36 (12): : 5 - 5
  • [9] MICROSCOPICAL COMBUSTION STUDIES OF NITROCELLULOSE THIN-FILMS IN PRESSURIZED CAPILLARY TUBES
    MORROW, SI
    MICROSCOPE, 1973, 21 (04): : 229 - 241
  • [10] INTERACTION OF REACTIVELY SPUTTERED TAOX THIN-FILMS WITH IN-SN-O THIN-FILMS AND PROPERTIES OF TAOX THIN-FILMS
    OSHIO, S
    YAMAMOTO, M
    KUWATA, J
    MATSUOKA, T
    JOURNAL OF APPLIED PHYSICS, 1992, 71 (07) : 3471 - 3478