FORMATION OF PALLADIUM SILICIDE IN THE PRESENCE OF AL WITH AND WITHOUT A CARBON BARRIER LAYER

被引：7

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作者：

CHANG, CA

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 17期

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D O I：

10.1063/1.101411

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：1656 / 1658

页数：3

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