DEVICE ISOLATION BY OXYGEN IMPLANTATION IN N-TYPE INDIUM-PHOSPHIDE

被引:3
|
作者
THOMPSON, PE
BINARI, SC
DIETRICH, HB
HENRY, RL
机构
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D O I
10.1016/0038-1101(84)90031-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:817 / 818
页数:2
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