共 50 条
- [31] Process induced charging damage in thin gate oxides 1997 2ND INTERNATIONAL SYMPOSIUM ON PLASMA PROCESS-INDUCED DAMAGE, 1997, : 21 - 24
- [32] Process induced charging damage in thin gate oxides 1996 INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP FINAL REPORT, 1996, : 168 - 168
- [35] Reliability characterization of process charging impact on thin gate oxide 1998 3RD INTERNATIONAL SYMPOSIUM ON PLASMA PROCESS-INDUCED DAMAGE, 1998, : 38 - 41
- [36] Scatterometry measurements for process monitoring of polysilicon gate etch PROCESS, EQUIPMENT, AND MATERIALS CONTROL IN INTEGRATED CIRCUIT MANUFACTURING III, 1997, 3213 : 79 - 90
- [37] Stress induced degradation features of very thin gate oxides Microelectronics Reliability, 1998, 38 (02): : 195 - 199
- [38] Stress induced degradation features of very thin gate oxides MICROELECTRONICS AND RELIABILITY, 1998, 38 (02): : 195 - 199
- [40] BT degradation, the new threat to ultra-thin gate oxide NEC RESEARCH & DEVELOPMENT, 2001, 42 (01): : 37 - 42