SOLUBILITY AND THERMAL PREDEPOSITION OF PHOSPHORUS AND BORON IN SILICON

被引：0

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作者：

ANGELUCCI, R

ARMIGLIATO, A

CELOTTI, G

NEGRINI, P

NOBILI, D

OSTOJA, P

SERVIDORI, M

SOLMI, S

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来源：

ELETTROTECNICA | 1977年 / 64卷 / 08期

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中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：663 / 663

页数：1

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