SYNTHESIS OF MON AND RUN BY ACTIVE NITROGEN SPUTTERING

被引：10
|
作者：
IHARA, H [1 ]
TERADA, N [1 ]
SENZAKI, K [1 ]
HIRABAYASHI, M [1 ]
KIMURA, Y [1 ]
UZUKA, R [1 ]
KAWASHIMA, F [1 ]
AKIMOTO, M [1 ]
KEZUKA, H [1 ]
机构：
[1] TOKYO ENGN UNIV,FAC ENGN,DEPT ELECTR,HACHIOJI,TOKYO 194,JAPAN
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 02期
关键词：
D O I：
10.1109/TMAG.1987.1064969
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1011 / 1013
页数：3
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