SYNTHESIS OF MON AND RUN BY ACTIVE NITROGEN SPUTTERING

被引：10

作者：

IHARA, H ^{[1
]}

TERADA, N ^{[1
]}

SENZAKI, K ^{[1
]}

HIRABAYASHI, M ^{[1
]}

KIMURA, Y ^{[1
]}

UZUKA, R ^{[1
]}

KAWASHIMA, F ^{[1
]}

AKIMOTO, M ^{[1
]}

KEZUKA, H ^{[1
]}

机构：

[1] TOKYO ENGN UNIV,FAC ENGN,DEPT ELECTR,HACHIOJI,TOKYO 194,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 02期

关键词：

D O I：

10.1109/TMAG.1987.1064969

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1011 / 1013

页数：3

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