SOFT-X-RAY SPECTRAL CHARACTERIZATION OF RESIST POLYMER USING SYNCHROTRON RADIATION

被引：2
|
作者：
MOCHIJI, K [1 ]
KIMURA, T [1 ]
OBAYASHI, H [1 ]
YANAGIHARA, M [1 ]
机构：
[1] NATL LAB HIGH ENERGY PHYS,OHO,IBARAKI 305,JAPAN
来源：
APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 03期
关键词：
D O I：
10.1063/1.95201
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：251 / 252
页数：2
相关论文
共 50 条
  • [41] A FINE FOCUSING SOFT-X-RAY SOURCE FOR R AND D WORK OF THE SOFT-X-RAY MICROSCOPY STATION AT THE BEPC SYNCHROTRON RADIATION LABORATORY
    CUI, MQ
    XU, WX
    LIU, LB
    HENG, HG
    TANG, ES
    SUN, ZY
    QI, LR
    XIAN, DC
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1989, 277 (2-3): : 673 - 676
  • [42] MEASUREMENT OF SPECTRAL AND SPATIAL INTENSITY DISTRIBUTIONS OF SYNCHROTRON RADIATION IN SOFT-X-RAY REGION BY MEANS OF HELIUM GAS SCATTERING
    GOTOH, S
    TAGUCHI, T
    OKAMURA, S
    HISATSUGU, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07): : 2239 - 2242
  • [43] EVALUATION OF SOFT-X-RAY SPECTRAL THROUGHPUT OF PLATINUM-COATED, COPPER, SYNCHROTRON-RADIATION COLLECTION MIRRORS
    BACHRACH, RZ
    FLODSTROM, SA
    BAUER, RS
    REHN, V
    JONES, VO
    NUCLEAR INSTRUMENTS & METHODS, 1978, 152 (01): : 135 - 139
  • [44] CHARACTERIZATION OF AZ PN114 RESIST FOR SOFT-X-RAY PROJECTION LITHOGRAPHY
    EARLY, K
    TENNANT, DM
    JEON, DY
    MULGREW, PP
    MACDOWELL, AA
    WOOD, OR
    KUBIAK, GD
    TICHENOR, DA
    APPLIED OPTICS, 1993, 32 (34): : 7044 - 7049
  • [45] VUV SOFT-X-RAY SPECTROSCOPIC FACILITIES AT THE SYNCHROTRON-RADIATION-LABORATORIES IN JAPAN
    NAMIOKA, T
    PHOTOCHEMISTRY AND PHOTOBIOLOGY, 1986, 44 (03) : 245 - 264
  • [46] NUMERICAL-SIMULATION OF A SOFT-X-RAY LI LASER PUMPED WITH SYNCHROTRON RADIATION
    ROZSNYAI, B
    WATANABE, H
    CSONKA, PL
    PHYSICAL REVIEW A, 1985, 32 (01): : 357 - 366
  • [47] REFLECTANCE DEGRADATION OF SOFT-X-RAY MULTILAYER FILTERS UPON EXPOSURE TO SYNCHROTRON RADIATION
    YAMAMOTO, M
    YANAGIHARA, M
    ARAI, A
    CAO, JL
    MIZUIDE, T
    KIMURA, H
    MAEHARA, T
    NAMIOKA, T
    PHYSICA SCRIPTA, 1990, 41 (01): : 21 - 24
  • [48] SOFT-X-RAY SYNCHROTRON-RADIATION FACILITIES FOR THE STUDY OF MAGNETIC-MATERIALS
    TONNER, B
    OBRIEN, W
    GREEN, MA
    HOCHST, H
    REININGER, R
    JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) : 6811 - 6811
  • [49] SOFT-X-RAY EMISSION-SPECTROSCOPY USING SYNCHROTRON LIGHT EXCITATION
    CALLCOTT, TA
    EDERER, DL
    ARAKAWA, ET
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 447 : 61 - 67
  • [50] A POLARIMETER FOR SOFT-X-RAY AND VUV RADIATION
    GLUSKIN, ES
    GAPONOV, SV
    DHEZ, P
    ILYINSKY, PP
    SALASHCHENKO, NN
    SHATUNOV, YM
    TRAKHTENBERG, EM
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3): : 394 - 396
12345