SOFT-X-RAY SPECTRAL CHARACTERIZATION OF RESIST POLYMER USING SYNCHROTRON RADIATION

被引：2
|
作者：
MOCHIJI, K [1 ]
KIMURA, T [1 ]
OBAYASHI, H [1 ]
YANAGIHARA, M [1 ]
机构：
[1] NATL LAB HIGH ENERGY PHYS,OHO,IBARAKI 305,JAPAN
来源：
APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 03期
关键词：
D O I：
10.1063/1.95201
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：251 / 252
页数：2
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