SOFT-X-RAY SPECTRAL CHARACTERIZATION OF RESIST POLYMER USING SYNCHROTRON RADIATION

被引：2
|
作者：
MOCHIJI, K [1 ]
KIMURA, T [1 ]
OBAYASHI, H [1 ]
YANAGIHARA, M [1 ]
机构：
[1] NATL LAB HIGH ENERGY PHYS,OHO,IBARAKI 305,JAPAN
来源：
APPLIED PHYSICS LETTERS | 1984年 / 45卷 / 03期
关键词：
D O I：
10.1063/1.95201
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：251 / 252
页数：2
相关论文
共 50 条
  • [1] SOFT-X-RAY SPECTRAL CHARACTERIZATION OF RESIST USING SYNCHROTRON RADIATION
    MOCHIJI, K
    KIMURA, T
    OBAYASHI, H
    MAEZAWA, H
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 539 : 56 - 60
  • [2] SOFT-X-RAY SPECTROSCOPY OF POLYMER RESIST USING SYNCHROTRON RADIATION
    MOCHIJI, K
    SOODA, Y
    ITO, M
    KIMURA, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07): : 2160 - 2163
  • [3] SOFT-X-RAY LITHOGRAPHY USING SYNCHROTRON RADIATION
    YAMASHITA, Y
    GOTOH, S
    ISHIWARI, H
    FUJITSU SCIENTIFIC & TECHNICAL JOURNAL, 1989, 25 (04): : 317 - 324
  • [4] CHARACTERIZATION OF MULTILAYER REFLECTORS FOR THE SOFT-X-RAY REGION USING SYNCHROTRON RADIATION
    SAKURAI, M
    FUJITA, J
    YAMASHITA, K
    OHTANI, M
    HATSUKADE, I
    TAMURA, K
    NAGATA, H
    SUZUKI, Y
    SEKI, S
    VACUUM, 1990, 41 (4-6) : 1234 - 1236
  • [5] SPECTRAL CHARACTERIZATION OF UNDULATOR RADIATION IN THE SOFT-X-RAY REGION
    MAEZAWA, H
    SUZUKI, Y
    KITAMURA, H
    SASAKI, T
    APPLIED OPTICS, 1986, 25 (18): : 3260 - 3268
  • [6] MULTILAYER MIRROR FOR SOFT-X-RAY SYNCHROTRON RADIATION
    ISHII, Y
    TAKENAKA, H
    KINOSHITA, H
    KURIHARA, K
    NTT REVIEW, 1990, 2 (04): : 77 - 85
  • [7] Synchrotron radiation, soft-X-ray spectroscopy and nanomaterials
    Guo, Jinghua
    INTERNATIONAL JOURNAL OF NANOTECHNOLOGY, 2004, 1 (1-2) : 193 - 225
  • [8] FOCUSING OF SYNCHROTRON RADIATION IN SOFT-X-RAY REGION
    AOKI, S
    KAWATA, S
    SAKAYANAGI, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1978, 17 (04) : 733 - 734
  • [9] SOFT-X-RAY MICROSCOPY AND LITHOGRAPHY WITH SYNCHROTRON RADIATION
    GUDAT, W
    NUCLEAR INSTRUMENTS & METHODS, 1978, 152 (01): : 279 - 288
  • [10] SOFT-X-RAY FLUORESCENCE SPECTROSCOPY USING TUNABLE SYNCHROTRON-RADIATION
    NORDGREN, J
    WASSDAHL, N
    JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1995, 72 : 273 - 280
12345