ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS THROUGH INSULATING LAYERS - ERROR CORRECTION BY NUMERICAL-SIMULATION

被引：0
|
作者：
FREMONT, H [1 ]
TOUBOUL, A [1 ]
DANTO, Y [1 ]
机构：
[1] UNIV BORDEAUX 1,ENSERB,IXL,CNRS,URA 846,F-33405 TALENCE,FRANCE
来源：
REVUE DE PHYSIQUE APPLIQUEE | 1990年 / 25卷 / 06期
关键词：
D O I：
10.1051/rphysap:01990002506049900
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：499 / 507
页数：9
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